Highly Integrated Microfluidics Design

Highly Integrated Microfluidics Design......Page 2
Contents......Page 6
Preface......Page 10
1 Microfabrication Techniques......Page 14
1.1 Introduction......Page 15
1.2.1 PDMS Molding and Soft Lithography
......Page 16
1.2.2 Metallic Fabrication......Page 20
1.2.3 Plastic Fabrication
......Page 27
1.2.5 Silicon/Glass
Fabrication......Page 30
1.3 Technology Selection Criteria
......Page 48
1.3.1 Required Functionality
......Page 49
1.3.2 Physical Requirements......Page 58
1.3.3 Chemical Resistance......Page 60
1.3.3 Chemical Resistance......Page 61
1.4 Conclusions......Page 62
References
......Page 63
2 Microfluidic Building Blocks......Page 68
2.2 Functional Approach
......Page 69
2.3 Single-Phase Fluid Manipulation
......Page 70
2.3.1 Active Valves
......Page 71
2.3.2 Passive Valves
......Page 84
2.3.3 Pumping Techniques
......Page 88
2.3.4 Single-Phase Mixing
......Page 104
2.4 Droplet-Based Fluid Manipulation......Page 112
2.4.1 Droplet and Emulsion Generators......Page 114
2.4.2 Droplet-Based Mixing
......Page 120
2.4.3 Droplet Manipulations
......Page 121
2.5 Detection and Measurment Techniques
......Page 127
2.5.1 Optical Measurements
......Page 128
2.5.2 Chemical Measurements
......Page 133
2.5.3 Physical Measurements......Page 136
2.6 Conclusions
......Page 139
References
......Page 140
3 Microscale Physics......Page 152
3.1 Introduction
......Page 153
3.2 Diffusion Laws
......Page 154
3.3 Fluid Dynamics......Page 156
3.3.1 Mass Conservation Equation
......Page 157
3.3.2 Momentum Equation
......Page 158
3.3.3 Fluid Forces
......Page 160
3.3.4 Navier-Stokes Equation
......Page 164
3.3.5 Stokes (Creeping) Flow
......Page 167
3.3.6 Equivalence Between Fluidic and Electrical Circuits
......Page 179
3.4 Surface Tension and Wetting
......Page 185
3.4.1 Surface Tension Forces
......Page 186
3.4.2 Wetting Considerations
......Page 187
3.4.3 Surfactants and Marangoni Stresses
......Page 189
3.5.1 Electrophoresis
......Page 191
3.5.2 Dielectrophoresis
......Page 192
3.5.3 Electro-Osmotic Flow
......Page 193
3.5.4 Electrowetting (Electrocapillarity)
......Page 194
3.6 Conclusions......Page 195
References
......Page 196
4 Microfluidic Design
......Page 198
4.2 Technology
......Page 199
4.2.1 Functional Description
......Page 200
4.2.2 Integration: Monolithic Versus Hybrid
......Page 201
4.2.3 Material Choices
......Page 206
4.2.4 In-House Versus Outsourced Fabrication
......Page 207
4.2.5 Fabrication Process: Definition and Optimization
......Page 209
4.3.1 Mask Design
......Page 218
4.3.2 Fluidic System Optimization
......Page 223
4.4 Conclusions
......Page 229
References
......Page 231
5 
Integrated Microfluidic Systems......Page 234
5.1 Introduction
......Page 235
5.2 Remarks About the Mircofluidics Market
......Page 236
5.3.1 Microfluidic Large-Scale Integration: Fluidigm
......Page 238
5.3.2 RainStorm Droplet Technology: RainDance
......Page 242
5.3.3 Modular Plastic Microfluidics: ThinXXS
......Page 245
5.3.4 Resonate Silicon Mircotubes: ISSYS
......Page 248
5.3.5 Nanopump MEMS Drug Infusion: Debiotech
......Page 250
5.3.6 CMOSens Sensor/Electronics Integration: Sensirion
......Page 253
5.3.7 Integrated Gas Chromatography Microsystem: C2V
......Page 255
5.4 Conclusions
......Page 257
References
......Page 259
About the Author
......Page 262
Index
......Page 264